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MX63 / MX63L

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Streamline Your Large Sample Inspection Workflow

The MX63 and MX63L microscope systems are optimized for high-quality inspections of wafers as large as 300 mm, flat panel displays, circuit boards, and other large samples. Their modular design enables you to choose the components you need to tailor the system to your application.

These ergonomic and user-friendly microscopes help increase throughput while keeping inspectors comfortable while they do their work. Combined with OLYMPUS Stream image analysis software, your entire workflow, from observation to report creation, can be simplified.

Streamline Your Large Sample Inspection Workflow


Functional

Designed to meet the ergonomic and safety requirements of the electronics industry with added functionality to enhance analysis capabilities.

 
 
 
 
00:00|00:31
 
 
 
 

 

 
 
 
 
00:00|00:28
 
 
 
 

 Learn more >>


User-Friendly

Simplified microscope settings makes it easier for users to make adjustments and reproduce system settings.

 
 
 
 
00:00|00:43
 
 
 
 

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Advanced Imaging Technology

Our proven optics and exceptional imaging technology deliver clear images and reliable inspections. 

 
 
 
 
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Modular

Users can customize their system with the components that suit their application.

Modular

Learn more >>


Application Image Gallery

Our advanced image management capability shows what you really want to observe.

 
 

 

MX63

MX63L

Optical system

UIS2 optical system (infinity-corrected system)

Microscope frame

Reflected light illumination

White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp 

Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.) 

3 position coded mirror units changed by manual operation 

Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield) 

Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, infra-red*1 and MIX observation(4 directional darkfield)*2

*1 Optional mirror cube, *2 MIX observation configuration is required

Transmitted light illumination

Transmitted light illumination unit: MX-TILLA or MX-TILLB is required. 

- MX-TILLA: a condenser (NA 0.5) and an aperture stop 

- MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop 

Light source: LG-PS2 (12 V,100 W halogen lamp) Light guide: LG-SF     

Observation mode: brightfield, simple polarizing

Focus

Stroke: 32 mm 

Fine stroke per rotation: 100 μm 

Minimum graduation: 1μm 

Upper limit stopper and torque adjustment for coarse handle

Maximum load weight (including stage and holder)

8 kg

15 kg

Observation tube

Wide-field (FN 22 mm)

Erect and trinocular: U-ETR4 

Erect, tilting and trinocular: U-TTR-2 

Inverted and trinocular: U-TR30-2, U-TR30IR (for IR observation) 

Inverted and binocular: U-BI30-2 

Inverted, tilting and binocular: U-TBI30

Super-wide-field (FN 26.5 mm)

Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%) 

Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%) 

Inverted and trinocular: U-SWTR-3

Motorized nosepiece

Brightfield 

Motorized sextuple with a slider slot for DIC: U-D6REMC 

Motorized centerable quintuple with a slider slot for DIC: U-P5REMC

Brightfield and darkfield 

Motorized sextuple with a slider slot for DIC: U-D6BDREMC 

Motorized quintuple with a slider slot for DIC: U-D5BDREMC 

Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC

Stage (X × Y)

Coaxial right handle with built-in clutch drive: MX-SIC8R 

Coaxial right handle with built-in clutch drive: MX-SIC1412R2 

Stroke: 210 x 210 mm 

Stroke: 356 x 305 mm 

Transmitted light illumination area: 189 x 189 mm

Transmitted light illumination area: 356 x 284 mm

Coaxial right handle with built-in clutch drive: MX-SIC6R2 

 

Stroke: 158 x 158 mm 

 

(Reflected light use only)

 

Weight

Approx. 35.6kgMicroscope frame 26kg

Approx. 44kgMicroscope frame 28.5kg

 

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