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    With the Olympus LEXT OLS5000 laser scanning confocal microscope, noncontact, nondestructive 3D observations and measurements are easy to produce. Simply by pushing the Start button, users can measure fine shapes at the submicron level. Ease of use is combined with leading-edge features to deliver an acquisition speed four times faster than our previous model. For customers with larger samples, LEXT long working distance objectives and an extended frame option allow the system to accommodate samples as large as 210 mm.

LEXT™ OLS5100 3D Laser Scanning Microscope

3d microscopeLaser Microscope for Material Analysis

Smart Workflow, Faster Experiments

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

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Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

  • Guaranteed measurement accuracy*
  • Renowned Olympus optics reduce aberration to capture the correct shape of your sample throughout the entire field of view
  • Smart Lens Advisor helps you choose the right objective lens for your roughness measurement
*The information, including guaranteed accuracy, on this web page is based on conditions set by Olympus.
industrial microscope objective lens








Total magnification

54x - 17,280x

Field of view

16um - 5,120um

Measurement principle

Optical system

Reflection-type confocal laser scanning laser microscope 

Reflection-type confocal laser scanning laser-DIC microscope 



Light receiving element

Laser: Photomultiplier (2ch) 

Color: CMOS color camera

Height measurement

Display resolution


Dynamic range

16 bits

Repeatability σn-1*1 *2 *6

20x: 0.03μm, 50x: 0.012μm, 100x: 0.012μm

Accuracy *1 *3 *6

0.15+L/100μm (L:Measuring length[mm])

Accuracy for stitched image *1 *4 *6

20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[μm])

Measurement noise
(Sq noise) *1 *5 *6


Width measurement

Display resolution


Repeatability 3σn-1  *1 *6

20x: 0.05μm, 50x: 0.04μm, 100x: 0.02μm

Accuracy *1 *3 *6

Measurement value +/- 1.5%

Accuracy for stitched image *1 *3 *6

20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[mm])

Maximum number of measuring points in a single measurement

4096 x 4096 pixel

Maximum number of measuring points

36 Mpixel

XY stage configuration

Length measurement module




Operating range

100 x 100mm Motorized

100 x 100mm Manual

300 x 300 mm Motorized

100 x 100mm Motorized

100 x 100mm Manual

Maximum sample height






Laser light source



Maximum output

0.95 mW

Laser class

Class 2 (IEC60825-1:2007, IEC60825-1:2014)

Color light source

White LED

Electrical power

240 W

240 W

278 W

240 W

240 W


Microscope body

Approx. 31 kg

Approx. 32 kg

Approx. 50 kg

Approx. 43 kg

Approx. 44 kg

Control box

Approx. 12 kg

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±1%) specified in ISO554(1976), JIS Z-8703(1983).

*2 When measured with MPLAPON LEXT series objectives.

*3 When measured with dedicated LEXT objective.

*4 When measured with dedicated LEXT objective of 20X or higher.

*5 Typical value when measured with MPLAPON100XLEXT objective.

*6 Guaranteed under Olympus Certificate System.



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Surface roughness measurement of the cam lobe of a camshaft

OLS5000 microscope


A camshaft is one of the most critical components in an engine valve system, which relates to the opening and closing of intake and exhaust valves. A part of the camshaft, known as the cam lobe, opens the inlet and outlet ports of the combustion chamber by pushing the intake and exhaust valves. There are two methods by which the camshaft can push the valves: One method is to push valves using a type of lever mechanism called rocker arms. The other method is to push cup-like devices called valve lifters. Whichever method is chosen, these parts and the cam lobe repeatedly slide against each other at very high speed when the camshaft is rotating. For this reason, cam lobes are required to have a high abrasion resistance. 

In the machining process, surface roughness management is essential to reduce the friction between the cam lobe and the parts that slide against it as much as possible. The most common type of surface roughness measurement uses a contact-type surface roughness gage, but this probe-based measurement only allows you to acquire linear roughness data, limiting the overall inspection accuracy.

Olympus’ Solution Using the LEXT OLS5000 Microscope

Roughness measurements using the Olympus LEXT OLS5000 3D laser scanning microscope provide planar roughness data, which is more accurate than linear roughness data alone.

Product Benefits and Features

  1. Laser scanning measurement of planar roughness enables you to acquire more accurate data. 
  2. When the surface roughness of a sample whose shape has an inclination like that of a camshaft is measured, it is important to accurately measure the roughness of the inclined surface by acquiring optically-correct data instead of digitally-corrected data. The LEXT OLS5000 microscope uses dedicated lenses that adapt to its 405 nm laser wavelength and eliminate aberration as much as possible. These lenses enable you to acquire correct data, even for an inclined area. 
  3. In addition to roughness data, 3D and intensity images can be acquired, making the camshaft surface more easily recognized. 
  4. Various kinds of data can be stitched together horizontally, enabling easy acquisition of extensive data. Using the pattern matching function and the position information of the stage’s critical dimension module, the LEXT OLS5000 microscope can provide stitching data that helps ensure measurement accuracy.


A camshaft set on a LEXT OLS5000 microscope
A camshaft set on a LEXT OLS5000 microscope

Images of roughness measurements using a LEXT OLS5000 microscope
Images of roughness measurements using a LEXT OLS5000 microscope

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