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Laser Microscope for Material Analysis
Smart Workflow, Faster Experiments
Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with innovative tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.
Guaranteed Measurement Accuracy
LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data that you can be confident in.
Guaranteed measurement accuracy
10x to 100x objectives that reduce aberrations at 405 nm to capture the correct shape of your sample throughout the entire field of view
Smart Lens Advisor helps you choose the right objective lens for your roughness measurement
Conventional lenses have difficulty making accurate measurements in peripheral areas.
Easy Laser Scanning Microscopy
The thoughtfully designed software makes using the microscope easy for novice and experienced users
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Acquire accurate data easily—put your sample on the stage and press the start button
Measurement performance guarantee tailored to your operating environment*.
The information, including guaranteed accuracy, on this web page is based on conditions set by Evident.
Easier Material Engineering and Failure Analysis Experiments
The Smart Experiment Manager
simplifies your submicron 3D observation and failure analysis experiment workflows
by automating previously time-consuming tasks.
Automate your analysis workflow with macro functions
Measurement data is easy to organise
Autopopulates data to your experiment plan matrix, reducing the chance of input errors
Measurement results are displayed in a list, enabling a pass/fail judgment at a glance.
Fully Customizable to Your Specifications
Implement all the advanced features of the OLS5100 laser scanning microscope for material analysis of large and heavy samples.
Service and Support You Can Trust
From calibration to training, we offer a broad portfolio of services to help you maintain optimal device performance. Evident service contracts are:
Straightforward—so you can focus on the core of your business
Efficient—we can schedule preventative maintenance, including calibrations, on your behalf
Cost-effective—providing you savings throughout the life of the contract
Benefits
Laser Microscope Benefits
1. Sub-micron 3D observation/measurement
Observe steps in the nanometer range and measure height differences at the sub-micron level.
2. ISO25178-compliant surface roughness measurement
Measure surface roughness from linear to planar
3. Non-contact, nondestructive, and fast
No sample preparation is required. Place the sample on the stage, and you'll be ready to measure.
Reliable Data at the Push of a Button
Smart Scan II
The Smart Scan II feature lets experienced and novice users acquire data quickly and easily. Place the sample on the stage, press the start button, and the microscope does the rest.
PEAK algorithm： The OLS5100 microscope incorporates a PEAK algorithm for 3D data construction. This algorithm provides highly accurate data from low to high magnifications and reduces the data acquisition time.
Skip unnecessary scans: When measuring the shape of steps on a sample containing near-vertical planes, such as an electronic component or MEMS, the data acquisition time can be reduced by skipping the unnecessary scanning range in the Z-direction. A 100 μm step can be measured in about 10 seconds without degrading the accuracy (when using a MPLAPON50XLEXT objective).
Accurate shape data： The OLS5100 microscope’s automatic judgment system adjusts to the requirements of each sample, while the HDR scan acquires two sets of shape information by varying the detection sensitivity to build accurate shape data.
Measurement performance guarantee tailored to your operating environment
Accuracy and repeatability guaranteed
The performance of a measuring tool is typically expressed using accuracy, which indicates how close a measurement value is to its true value, and repeatability, which indicates the degree of variation in repeated measurement values. We guarantee the accuracy and repeatability of the microscope based on a traceable system so that you can be confident in your measurement results.
Surface metrology beyond the field of view
The OLS5100 microscope incorporates a length-measuring module in the motorized stage, and we guarantee the accuracy of the stitched image data. While previous laser microscopes stitched data based on pattern matching, the OLS5100 microscope adds the position information from the length measuring module to the pattern matching to provide highly reliable stitched data with guaranteed accuracy.
*Only for OLS5100-SAF/EAF
User-Friendly High-Resolution/High-Magnification Observation
Continuous auto focus
The microscope’s continuous autofocus keeps your images in focus when moving the stage or changing objectives, minimizing the need for manual adjustments. Permanent focus tracking enables you to perform observations quickly and easily.
Dual DIC for nano-scale, real-time observation
Detect minute damage in your sample with real-time, nanometerscale observation. Differential interference contrast (DIC) observation enables you to visualize nanometer-scale surface contours that are normally beyond the resolving power of a laser microscope. With DIC laser mode, the OLS5100 microscope can obtain live images comparable to those of an electron microscope, even when using a 5x or 10x low-power objective.
Back surface of wafer
Hard disk landing zone
Comprehensive Analysis
Many analysis functions are available. The following is just an example, so please download the brochure or contact your Evident representative for details.
ISO25178 compliant areal roughness measurement
The OLS5100 microscope scans the sample surface with a 0.4 μm diameter laser beam, enabling it to easily measure the surface roughness of samples that cannot be measured with contact surface roughness gauges. The ability to simultaneously acquire the color image, laser image, and 3D shape data of a surface that can't be measured with a contact surface roughness gauge expands the scope of analysis.
Profile measurement/ Measurement assist tool
The profile measurement function displays the surface profile by arbitrarily drawing a measurement line on the position to be measured on an image. It also measures the step between any two arbitrary points, width, cross-sectional area, and radius. Unlike contact-based measuring tools, setting the measured positions is easy. The measurement lines and points can be checked on the image, so even a very small site can be measured accurately. With the Measurement assist tool, the point to be measured can be correctly specified using the highest, lowest, middle, and/or mean points. When a site is specified in the acquired data, the feature points are automatically extracted according to specified conditions.
Measurement of the step between the highest and lowest points in a surface profile
Software
Simple Material Engineering and Failure Analysis Experiment Management
Managing experiment conditions when testing new materials is complicated, so the OLS5100 laser microscope’s Smart Experiment Manager simplifies the process by automating key steps, such as creating the experiment plan.
Automate Routine Workflows
Macro function
You can automate the entire inspection workflow using the macro production tool. Easily create and edit procedures, and then run the registered macro file to obtain reliable results. Combined with the Smart Experiment Manager, you can make pass/fail judgments with a single click.
Streamline Data Organization
Quick data sorting
Even if experimental conditions have not been determined in advance, conditions can be determined while acquiring data. Conditions can be changed during the experiment, and images and analysis data can be easily added by drag-and-drop. It supports flexible experiments tailored to the user's workflow.
Automatic data input
The software automatically adds values to your experiment plan matrix to minimize the chance of input errors. In just a couple of clicks, you can export your data to an Excel spreadsheet.
Easy Experiment Condition Data Organization
Automatic file name generation
You can click on each cell in the experiment plan, and the software will automatically generate a file name that contains the evaluation conditions for easy record keeping. Each file contains the associated images and data.
Fast Measurement Results
Tolerance judgment
The tolerance judgment function enables you to confirm pass/fail at a glance based on set tolerances. The tolerance can be verified by changing the threshold value based on the sample yield.
Heat map
The software’s color map helps you better understand that data you collect during your experiment. The colors and heat map percentages are easy to change. Intuitive chart layouts and heat maps enable fast data visualization so that you can spot issues earlier in the process.
Multidata Analysis
Comparative data analysis
You can analyze multiple acquired datasets side by side with their display scales and 3D display angles integrated. Image correction and analysis can be performed simultaneously. This is useful for analyzing the shape of multiple samples with different processing conditions or for defect analysis. Various images, profiles, and numerical results can be exported to Excel, making it easier to quickly arrange and evaluate your data.
| Model | OLS5100-SAF | OLS5100-SMF | OLS5100-LAF | OLS5100-EAF | ||
|---|---|---|---|---|---|---|
| Total magnification |
54x–17,280x |
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| Field of view |
16 µm–5,120 µm |
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| Measurement principle | Optical system | Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC |
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| Light receiving element | Laser: Photomultiplier (2 channels) Color: CMOS color camera |
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| Height measurement | Display resolution | 0.5 nm | ||||
| Dynamic range | 16 bits | |||||
| Repeatability σn-1*1 *2 *5 | 5X：0.45 μm, 10X：0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm | |||||
| Accuracy *1 *3 *5 | 0.15+L/100 μm (L:Measuring length[μm]) | |||||
| Accuracy for stitched image *1 *3 *5 | 10X：5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm]) | |||||
| Measurement noise (Sq noise) *1 *4 *5 | 1 nm (Type) | |||||
| Width measurement | Display resolution | 1 nm | ||||
| Repeatability 3σn-1 *1 *2 *5 |
5X: 0.45 µm, 10X: 0.1 µm, 20X: 0.03 µm, 50X: 0.012 µm, 100X: 0.012 µm |
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| Accuracy *1 *3 *5 | Measurement value +/- 1.5% | |||||
| Accuracy for stitched image *1 *3 *5 | 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm]) | |||||
| Maximum number of measuring points in a single measurement |
4096 × 4096 pixels |
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| Maximum number of measuring points |
36-megapixels |
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| XY stage configuration | Length measurement module | • | NA | NA | • | |
| Operating range |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Manual |
300 × 300 mm (11.8 × 11.8 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
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| Maximum sample height |
100 × 100 mm (3.9 × 3.9 in.) |
30 mm (1.2 in.) |
30 mm (1.2 in.) |
210 mm (8.3 in.) |
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| Laser light source | Wavelength | 405 nm | ||||
| Maximum output | 0.95 mW | |||||
| Laser class | Class 2 (IEC60825-1:2007, IEC60825-1:2014) | |||||
| Color light source | White LED | |||||
| Electrical power | 240 W | 240 W | 278 W | 240 W | ||
| Mass | Microscope body | Approx. 31 kg (68.3 lb) | Approx. 32 kg (70.5 lb) | Approx. 50 kg (110.2 lb) | Approx. 43 kg (94.8 lb) | |
| Control box | Approx. 12 kg (26.5 lb) | |||||
*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.
** The OS license of Window 10 has been certified for the microscope controller provided by olympus. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm
| Series | Model | Numerical Aperture (NA) | Working Distance (WD) (mm) |
|---|---|---|---|
| UIS2 objective lens | MPLFLN2.5x | 0.08 | 10.7 |
| MPLFLN5x | 0.15 | 20 | |
| Dedicated LEXT objective lens (10X) | MPLFLN10xLEXT | 0.3 | 10.4 |
| Dedicated LEXT objective lens (high-performance type) | MPLAPON20xLEXT | 0.6 | 1 |
| MPLAPON50xLEXT | 0.95 | 0.35 | |
| MPLAPON100xLEXT | 0.95 | 0.35 | |
| Dedicated LEXT objective lens (l |
