Wider Sample Range
Imaging Slopes up to 85°
With the Olympus LEXT OLS4100 laser scanning digital microscope non-contact 3D observations and measurements of surface features at 10 nanometer resolutions are easy to produce. The OLS4100 industrial microscope has distinctive features for fast image acquisition and high-resolution microscope images over a wider area.
Razor with an Acute Angle
Minimized Aberrations with Dedicated Objective
Micro-Profile Measurements with 10 nm Height Resolution
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany, 6 nm Detection in Height Measurement
These operative microscope capabilities also enable submicron measurements of a sample's surface and measurement of micro-roughness on an uneven surface. A precise 0.8 nanometer resolution linear scale and software algorithms, such as our original I-Z curve, can resolve height differences of 10 nanometers.
Overcoming Reflectance Differences
Diamond Electroplated Tool
Objective Lens: MPlanApoN50xLEXT
The OLS4100 opto-digital microscope employs a dual confocal system, incorporating two confocal optical light paths. In combination with a high sensitivity detector for precise 3D microscope images from a sample consisting of materials with different reflectance characteristics. (More on reflectance, measuring transparent samples and other imaging capabilities of the OLS4100 professional microscope in our gallery)
Applicable to Transparent Layers
The LEXT OLS4100's new multilayer mode is capable of recognizing the peaks of reflected light intensities originating from multiple layers. Setting each layer as the focal point makes it possible to observe and measure the upper surface of a transparent sample. This also enables the analysis of multiple layers, measuring the thickness of each layer.
Observation/Measurement of Multiple Layers of Transparent Material
The multi-layer mode facilitates observation and measurement of the transparent layer on the surface of a transparent sample. Even with a transparent resin layer on a glass substrate, the shape and roughness of each layer as well as the thickness of the surface film can be measured.
Industry's First* Double Performance Guarantee
Accuracy and Repeatability
The performance of a measuring tool is typically expressed using two different terms: "accuracy," which indicates how close a measurement value is to its true value, and "repeatability," which indicates the degree of variations among repeated measurement values. The OLS4100 is the industry's first laser scanning compound microscope to assure both accuracy and repeatability.
The OLS4100 uses a rigorous system of production for every component. From the objective lens to the laser head, Olympus delivers only the highest-quality systems based on comprehensive inspection to the strictest standards. On delivery, final adjustment and calibration is performed by qualified engineers in the actual measurement environment.
Wide Range of Measurement Types
This mode allows measurement of a step between any two arbitrary points on a surface profile. Profile Measurement is also available.
Surface Roughness Measurement
This mode allows measurement of line roughness on one line and plane roughness on the entire surface.
With a user-defined threshold level on a surface profile, this mode allows measurement of the volume (or area) of a geometry above or below the threshold level.
Particle Measurement (optional)
This mode enables auto-separation of particles with the separator function, setting of a threshold level, and setting of a detection range within a region of interest.
This mode allows measurement of the distance between two arbitrary points on a geometric image. The geometric shape and angle for circle, rectangle, etc. are measured.
Film Thickness Measurement (optional)
This mode allows the thickness of a film on a transparent body to be measured by detecting changes in refractive index.
Auto Edge Detection/ Measurement (optional)
This mode allows a line width or a diameter to be measured by automatically detecting edges in a geometric image. This reduces uncertainty by eliminating operator error.
OLYMPUS Stream (optional)
Workflow Solution for Improved Image Analysis Performance
After choosing the OLS4100 industrial microscope, final adjustment and calibration is performed by qualified engineers in the actual measurement environment. In addition, customers have the option to add OLYMPUS Stream digital micro imaging software for grain size analysis or nonmetallic inclusion rating directly to the OLS4100.
Improved Roughness Measurement
LEXT OLS 4100 Parameters
Specifically, for improved roughness measurement and surface analysis, the LEXT OLS4100 industrial microscope is calibrated in the same way as contact surface roughness gages. It has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gages to get output results from the system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement. A roughness surface-specific mode enables roughness profile measurement for sample lengths up to 100mm with an automatic line stitching function.
Accommodating Next-Generation Parameters
The OLS4100 comes with roughness (3D) parameters conforming to ISO25178 for reliable evaluation of the planar area.
LEXT OLS4100 performance is comparable with results of a sur face roughness gauge.
Contact surface roughness gages cannot measure micro surface contours less than the stylus tip diameter. The OLS4100 professional microscope can measure the surface roughness of micro geometries at high resolution due to a diminutive laser spot diameter.
Since a contact surface roughness gage uses a hard needle-shaped stylus, it is more likely to scratch the surface of a soft specimen. With adhesive specimens, on the other hand, the stylus can attach to the specimen and be damaged when pulled. The OLS4100 is a noncontact industrial microscope that can correctly identify a measuring position and easily perform accurate surface roughness measurement of a micro area regardless of surface texture conditions.
Measurement of Features at the Micron Level
Surface roughness gauges cannot measure micron-level features since their styli are not able to access these areas. The OLS4100 can correctly identify a measuring position and easily perform roughness measurement of a target micro area.
Crystal-Clear 3D Color Images
Three Types of Integrated Images
The OLS4100 industrial microscope can acquire three different types of information at the same time: a true-color optical microscope image, a laser microscope image, and height map. Operators can also capture an optical microscope image consisting of in-focus pixels only and integrate them with a true-color optical microscope image containing height information for crystal-clear 3D surface roughness color images.
Natural Color Reproduction
Real-Color 3D Image
Confocal 3D Laser Image
2D Color Image (Inkjet Dots on Paper, Objective Lens 20x)
3D Color Image (Inkjet Dots on Paper, Objective Lens 20x)
Thanks to a white LED light and a high-color-fidelity CCD camera in the OLS4100 industrial microscope, you can generate clear, natural-looking color images, comparable to those obtained with high-grade optical microscopes.
Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast)
Laser Image without DIC (Polymer Film)
Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast) Differential Interference Contrast (DIC) is an observation method used to visualize nanometer micro surface contours, which normally lie far beyond the resolving power of a laser microscope. This DIC laser mode in the OLS4100 industrial microscope allows you to obtain live images comparable to those of an electron microscope under relatively low power magnifications.
Laser Image with DIC (Polymer Film)
Laser Image without DIC (5x Objective Lens)
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany
Laser Image with DIC (5x Objective Lens)
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany,
Actual Height of the Feature : 6 nm
Optimized Balance Between Brightness and Contrast, HDR (High Dynamic Range) Imaging
Color Image without HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)
In addition to the previous capabilities, the OLS4100's High Dynamic Range (HDR) function combines several optical microscope images captured using different exposures. Brightness, contrast, texture and saturation are controlled individually for HDR to create images with a wide dynamic range. This enables clear visualization of a color image, especially for samples lacking texture.
Color Image with HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)